Power, Treatment gas (N2, CDA), Exhaust, Cooling water
Field | Usage |
---|---|
LCD | Increases the wettability of glass surfaces, improves the wet cleaning effect |
Touch panels, OLED, etc. | Reforms the surface of conductive film, pretreatment for bonding |
[Tested substrate] Bare Glass
Atmospheric-Pressure Plasma
EUV
[Tested substrate] Bare Glass