Features & Equipment specifications
1No damage
Low-temperature treatment & electrical field shielding
structure prevents damage
structure prevents damage
2Advanced treatment performance
High-speed (10 m/min) treatment at 10° or under
(treats glass substrates for LCD)
(treats glass substrates for LCD)
3Extensive lineup
Handles widths from 160 to 3400 mm
4Extensive and proven results
Adopted in LCD plants and numerous other production processes
Widths handled
160 to 3400 mm
Utility
Power, Treatment gas (N2, CDA), Exhaust, Cooling water
Applications
| Field | Usage |
|---|---|
| LCD | Increases the wettability of glass surfaces, improves the wet cleaning effect |
| Touch panels, OLED, etc. | Reforms the surface of conductive film, pretreatment for bonding |
Basic treatment performance
Contact angle data of glass substrate(dependence on conveying speed)
[Tested substrate] Bare Glass
Atmospheric-Pressure Plasma
EUV
Relation between conveying speed and changes in the substrate temperature
[Tested substrate] Bare Glass
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